Key capabilities for nano-optics and metasurfaces in the MIR are specifically unlocked by the graphene/silicon carbide combination. This platform allows to obtain any complex graphene -coated silicon carbide 3D nanostructures in a site – selective fashion at the wafer -scale and with sufficient adhesion for integration. ![]() We will review the learnings from the development of our epitaxial graphene on silicon carbide on silicon technology and some of its most promising applications. ![]() ![]() ABSTRACT: Harnessing graphene’s properties on a silicon platform could augment integrated technologies with a broad range of novel miniaturized functionalities.
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